Shahed University

design and fabrication of a dc cylindrical magnetorn sputtering device

Jahangir Payamara

URL :   http://research.shahed.ac.ir/WSR/WebPages/Report/PaperView.aspx?PaperID=211
Date :  2009/10/01
Publish in :    archives of applied science research


Keywords :fabrication, cylindrical, device

Abstract :